120MHzUV Picosecond Laser Source / DUV Picosecond Laser Source

高重频紫外/深紫外皮秒激光器
The laser source is the core componentsfor measurement equipment and annealing equipment in the semiconductorfront-end manufacturing process. They are the direct core consumables that affect the yield of wafer manufacturing and have great development potentially. At the same time, this series of products possess unique technical advantages insurface detection of materials, laser-induced breakdown spectroscopy (LlBS).laser-induced fluorescence (LlF), ultraviolet Raman spectrometer, and laser finemicroprocessing.
  • The maximum repetition frequency can reach 120 MHzachieving high-frequency output. This enables importsubstitution and helps promote the development of domestic semiconductor testing.
  • This product adopts an automatic point-changing scheme.which can significantly extend the service life of the laser,up to 20,000 hours or more.
  • Supports RS232, GATE and TRlG control, and has PSO function.
  • Modular design, stable structure, convenientmaintenance.
120M/80M Laser Series
Wavelength
266/355nm
Average Power
>4W/1W
Frequency
120MHz/80MHz
Pulse Width
10ps
Beam Quality
M²<1.3
Beam Diameter
3mm
Power Stability
RMS ≤ 1%
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华创鸿度开发的激光器产品是半导体前道制造设备中量测设备、退火设备工作的核心器件,是影响晶圆制造良率的直接核心耗材,拥有很大发展潜力。同时该系列产品在材料表面检测、激光诱导击穿光谱(LIBS)、激光诱导荧光(LIF)、紫外拉曼光谱仪、激光精细微加工等方面具有独特的技术优势。

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